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Advanced MicroSensors Announces Patent on Large-Stroke Electro-Magnetic Micro-Actuator Device Platform

(Click here for Magnetic Micro-Actuator video clip)

SHREWSBURY, MA -- May 10, 2004 -- Advanced MicroSensors, Inc. (AMS), a manufacturer of thin film magnetic micro-components, announced the issuance of a patent (U.S. 6,717,227) related to the design and architecture of low-voltage large-stroke electro-magnetic micro-actuators. This patent is the first in a series of co-pending AMS applications related to the novel device platform.

Utilizing a soft magnetic core and 3D solenoidal coil windings, the millimeter-sized micro-device actuates a proprietary thin film permanent magnet structure integrated atop a deep reactive ion etched SOI suspension/spring structure by a current-drivable variable magnetic field. Actuation-stroke, typically 50um, is achieved under 0.5V, and response curve is linear, making it readily integratable into communication, automotive, industrial and opto-electronic applications.

The platform supports creation of a range of micro-electronic products wherein tunability is important, states AMS Engineering Vice-President, Alan Sidman. These applications include micro-positioning of shutters, mirrors, gratings, capacitors, inductors or other structures. The flexible device design architecture allows separate optimization of design elements generating the magnetic field, the permanent magnet plunger actuation force and the restoring force suspension/spring structure, cites AMS Chief Technical Officer Dr. Hirokazu Tamura. He adds, The design also provides a built-in function of actuation stopper and eliminates end-of-stroke pull-in, typical of most electrostatic and magnetic actuator micro-devices.

The patent results from the collaborative effort between design and development teams at Advanced MicroSensors and Furukawa America Incorporated.

The device technology is available for license or for further development into customer targeted end-applications. Contact Advanced MicroSensors at newproducts@advancedmicrosensors.com or 508-770-6600.

About AMS

Founded in April 1999 and located in Shrewsbury, MA, Advanced MicroSensors is a rapidly growing producer of micro-components, specialty sensors and thin film tape heads. The company offers a single-site approach that takes integrated or discrete micro-electro-mechanical systems, micro-optoelectro-mechanical systems, sensors, actuators and data recording products from concept to commercialization. For more information, please visit the company's website at http://www.advancedmicrosensors.com/.

Company: Advanced MicroSensors, Inc.
Email: newproducts@advancedmicrosensors.com