Services

SEM/EDS Services

AMS offers Scanning Electron Beam Microscopy (SEM) and X-Ray Dispersive Spectra Photometry (EDS) services for process development, process verification and failure analysis.

Expert SEM/EDS services can save you time and money, whether you're racing against the clock to meet development milestones or one of your manufacturing lines is shut down while you perform fault analysis.

Read how AMS expert SEM/EDS engineers analyzed one customer's problem.

A customer whose wafers were manufactured in multiple steps by multiple manufacturers came to AMS to determine in what part of the process a foreign material was being placed or left on the wafer. AMS SEM/EDS engineers quickly determined exactly where and when in the manufacturing process the unwanted material was being left on the wafer. Quick and accurate failure analysis led to a speedy manufacturing resolution for this AMS customer.

SEM/EDS applications:

  • Metal profiles
  • Film thickness
  • Step coverage
  • Feature overlay
  • Particle inclusion
  • Voids, cracks & fissures
  • Delamination
  • Critical dimensions