Technology

AMR, GMR and Inductive Sensor Technologies

Advanced MicroSensors excels in design, fabrication and characterization technologies for AMR, GMR and inductive magnetic sensors. The performance of the integrated AMR read, inductive-write magnetic heads, which consists of multiple thin-film layers, has been optimized by integrating each of the technology elements. Enhanced performance is achieved by modeling, design rules, rigorously controlled magnetic properties, and various subtle "treatments" in the fabrication.

In order to accelerate their cost/performance curve, tape storage systems are facing new challenges. One challenge is to greatly improve the contact sensing scheme. As a member of NIST's multi-terabyte tape system program, AMS is undertaking unprecedented development to meet this challenge with innovative sensor and material designs, novel fabrication technologies and characterization capabilities.


Click here for more information on Magnetoresistive Materials (AMS, GMR and MTJ)

Thin Film Technologies for Micro-Components/MEMS

Our photolithography, vacuum and wet processing technologies create a variety of thin-film structures. We specialize in device property optimization through the micro-structure control of thin films. Our material portfolio includes:

  • Metals and Alloys - Au, Pt, Cr, Cu, Rh, Ru, Ta, Ti, Co-Fe, Co-Pt, Co-Zr-Mo, Co-Zr-Ta, Ir-Mn, Ni-Fe, Ni-Fe-Mo, Pt-Mn, Ti-W
  • Inorganic Materials - Alumina
  • Organic Materials - Photocureable polymers

Our patented, large stroke, low power consumption electro-magnetic MEMS actuator demonstrates our unique capability to integrate the thin-film fabrication, material and design technologies.

Characterization Technologies

Characterization technologies are key to correlating device properties with fabrication and optimizing the process conditions and tolerances. They include:

  • magnetic measurements
  • micro-structure observation (e.g., by FIB-SEM)
  • compositional analysis and computational experiments (i.e., modeling)

MTS - Multi-terabyte Tape System NIST Advanced Technology Program

In 2003, AMS was selected as a partner in the National Institute of Standards & Technology (NIST) Advanced Technology Program for Multi-terabyte Tape System. Our R&D efforts are now focused on GMR (Giant Magneto-Resistive) technologies, which will enable much higher areal densities for future tape drives and greater output for a range of commercial sensors.

ACTUATOR MOVIE

View movie clip of Advanced MicroSensors' Large-Stroke Electro-Magnetic Micro-Actuator Device Platform.


 SAL-biased MR sensor

Micro-magnetic modeling of a SAL-biased MR sensor.


deep reactive ion etching process

A high aspect ratio (>35) structure by deep reactive ion etching process.


SEM and TEM images of a multi-bilayer structure

SEM and TEM (insert) images of a multi-bilayer structure.